Database Needs for Modeling and Simulation of Plasma Processing

This book PDF is perfect for those who love Science genre, written by National Research Council and published by National Academies Press which was released on 21 October 1996 with total hardcover pages 74. You could read this book directly on your devices with pdf, epub and kindle format, check detail and related Database Needs for Modeling and Simulation of Plasma Processing books below.

Database Needs for Modeling and Simulation of Plasma Processing
Author : National Research Council
File Size : 43,5 Mb
Publisher : National Academies Press
Language : English
Release Date : 21 October 1996
ISBN : 0309175135
Pages : 74 pages
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Database Needs for Modeling and Simulation of Plasma Processing by National Research Council Book PDF Summary

In spite of its high cost and technical importance, plasma equipment is still largely designed empirically, with little help from computer simulation. Plasma process control is rudimentary. Optimization of plasma reactor operation, including adjustments to deal with increasingly stringent controls on plant emissions, is performed predominantly by trial and error. There is now a strong and growing economic incentive to improve on the traditional methods of plasma reactor and process design, optimization, and control. An obvious strategy for both chip manufacturers and plasma equipment suppliers is to employ large-scale modeling and simulation. The major roadblock to further development of this promising strategy is the lack of a database for the many physical and chemical processes that occur in the plasma. The data that are currently available are often scattered throughout the scientific literature, and assessments of their reliability are usually unavailable. Database Needs for Modeling and Simulation of Plasma Processing identifies strategies to add data to the existing database, to improve access to the database, and to assess the reliability of the available data. In addition to identifying the most important needs, this report assesses the experimental and theoretical/computational techniques that can be used, or must be developed, in order to begin to satisfy these needs.

Database Needs for Modeling and Simulation of Plasma Processing

In spite of its high cost and technical importance, plasma equipment is still largely designed empirically, with little help from computer simulation. Plasma process control is rudimentary. Optimization of plasma reactor operation, including adjustments to deal with increasingly stringent controls on plant emissions, is performed predominantly by trial and error.

DOWNLOAD
Database Needs for Modeling and Simulation of Plasma Processing

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