Fabrication Design of Resonant Microdevices

This book PDF is perfect for those who love Technology & Engineering genre, written by Behraad Bahreyni and published by William Andrew which was released on 20 October 2008 with total hardcover pages 250. You could read this book directly on your devices with pdf, epub and kindle format, check detail and related Fabrication Design of Resonant Microdevices books below.

Fabrication   Design of Resonant Microdevices
Author : Behraad Bahreyni
File Size : 53,6 Mb
Publisher : William Andrew
Language : English
Release Date : 20 October 2008
ISBN : 9780815519713
Pages : 250 pages
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Fabrication Design of Resonant Microdevices by Behraad Bahreyni Book PDF Summary

This book discusses the main issues of fabrication and design, and applications of micromachined resonant devices, including techniques commonly used for processing the output signal of resonant micro-electro-mechanical systems (MEMS). Concepts of resonance are introduced, with an overview of fabrication techniques for micromachined devices – important to understand as design options will depend on how the device will be fabricated. Also explained: excitation and signal detection methods; an analytic model of device behavior (a valuable design tool); numerical simulation techniques; issues of damping and noise for resonant MEMS; electronic interfacing; packaging issues; and numerous examples of resonant MEMS from academia and industry. Offers numerous academic and industrial examples of resonant MEMS Provides an analytic model of device behaviour Explains two-port systems in detail Devotes ample space to excitation and signal detection methods Covers issues of damping and noise for resonant MEMS, two topics of particular importance for high-Q devices

Fabrication   Design of Resonant Microdevices

This book discusses the main issues of fabrication and design, and applications of micromachined resonant devices, including techniques commonly used for processing the output signal of resonant micro-electro-mechanical systems (MEMS). Concepts of resonance are introduced, with an overview of fabrication techniques for micromachined devices – important to understand as design options

Get Book
Fabrication and Design of Resonant Microdevices

This book discusses the main issues on fabrication, design, and applications of micromachined resonant devices as well as techniques that are commonly used for processing the output signal of resonant micro-electro-mechanical systems (MEMS). After a brief introduction to the concepts of resonance, an overview of the fabrication techniques for micromachined

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