| Author | : Reza Ghodssi |
| File Size | : 50,6 Mb |
| Publisher | : Springer Science & Business Media |
| Language | : English |
| Release Date | : 18 March 2011 |
| ISBN | : 9780387473185 |
| Pages | : 1211 pages |
MEMS Materials and Processes Handbook by Reza Ghodssi Book PDF Summary
MEMs Materials and Processes Handbook" is a comprehensive reference for researchers searching for new materials, properties of known materials, or specific processes available for MEMS fabrication. The content is separated into distinct sections on "Materials" and "Processes". The extensive Material Selection Guide" and a "Material Database" guides the reader through the selection of appropriate materials for the required task at hand. The "Processes" section of the book is organized as a catalog of various microfabrication processes, each with a brief introduction to the technology, as well as examples of common uses in MEMs.