| Author | : C. Claeys |
| File Size | : 46,7 Mb |
| Publisher | : The Electrochemical Society |
| Language | : English |
| Release Date | : 01 September 2009 |
| ISBN | : 9781566777445 |
| Pages | : 547 pages |
ULSI Process Integration 6 by C. Claeys Book PDF Summary
ULSI Process Integration 6 covers all aspects of process integration. Sections are devoted to 1) Device Technologies, 2) Front-end-of-line integration (gate stacks, shallow junctions, dry etching, etc.), 3) Back-end-of-line integration (CMP, low-k, Cu interconnect, air-gaps, 3D packaging, etc.), 4) Alternative channel technologies (Ge, III-V, hybrid integration), and 5) Emerging technologies (CNT, graphene, polymer electronics, nanotubes).
