Author | : Simeon M. Metev |
File Size | : 48,5 Mb |
Publisher | : Springer Science & Business Media |
Language | : English |
Release Date | : 08 March 2013 |
ISBN | : 9783642973277 |
Pages | : 283 pages |
Laser Assisted Microtechnology by Simeon M. Metev Book PDF Summary
Laser-Assisted Microtechnology deals with laser applications to a wide variety of problems in microelectronic design and fabrication. It covers micromachining of thin films, microprocessing of materials, maskless laser micropatterning and laser-assisted synthesis of thin-film systems. The monograph describes fundamental aspects and practical details of the technological processes as well as the optimum conditions for their realization.