Metal Impurities in Silicon Device Fabrication

This book PDF is perfect for those who love Technology & Engineering genre, written by Klaus Graff and published by Springer Science & Business Media which was released on 08 March 2013 with total hardcover pages 228. You could read this book directly on your devices with pdf, epub and kindle format, check detail and related Metal Impurities in Silicon Device Fabrication books below.

Metal Impurities in Silicon Device Fabrication

Author	: Klaus Graff
File Size	: 43,7 Mb
Publisher	: Springer Science & Business Media
Language	: English
Release Date	: 08 March 2013
ISBN	: 9783642975936
Pages	: 228 pages

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Metal Impurities in Silicon Device Fabrication by Klaus Graff Book PDF Summary

A discussion of the different mechanisms responsible for contamination together with a survey of their impact on device performance. The author examines the specific properties of main and rare impurities in silicon, as well as the detection methods and requirements in modern technology. Finally, impurity gettering is studied along with modern techniques to determine gettering efficiency. Throughout all of these subjects, the book presents only reliable and up-to-date data so as to provide a thorough review of recent scientific investigations.

Metal Impurities in Silicon Device Fabrication by Klaus Graff

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