Author | : Cor Claeys |
File Size | : 51,5 Mb |
Publisher | : Springer |
Language | : English |
Release Date | : 13 August 2018 |
ISBN | : 9783319939254 |
Pages | : 438 pages |
Metal Impurities in Silicon and Germanium Based Technologies by Cor Claeys Book PDF Summary
This book provides a unique review of various aspects of metallic contamination in Si and Ge-based semiconductors. It discusses all of the important metals including their origin during crystal and/or device manufacturing, their fundamental properties, their characterization techniques and their impact on electrical devices’ performance. Several control and possible gettering approaches are addressed. The book offers a valuable reference guide for all researchers and engineers studying advanced and state-of-the-art micro- and nano-electronic semiconductor devices and circuits. Adopting an interdisciplinary approach, it combines perspectives from e.g. material science, defect engineering, device processing, defect and device characterization, and device physics and engineering.