Author | : Kenichi Takahata |
File Size | : 49,6 Mb |
Publisher | : BoD – Books on Demand |
Language | : English |
Release Date | : 01 December 2009 |
ISBN | : 9789533070278 |
Pages | : 528 pages |
Micro Electronic and Mechanical Systems by Kenichi Takahata Book PDF Summary
This book discusses key aspects of MEMS technology areas, organized in twenty-seven chapters that present the latest research developments in micro electronic and mechanical systems. The book addresses a wide range of fundamental and practical issues related to MEMS, advanced metal-oxide-semiconductor (MOS) and complementary MOS (CMOS) devices, SoC technology, integrated circuit testing and verification, and other important topics in the field. ?Several chapters cover state-of-the-art microfabrication techniques and materials as enabling technologies for the microsystems. Reliability issues concerning both electronic and mechanical aspects of these devices and systems are also addressed in various chapters.